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A comparison of scanning force microscopy and ellipsometry for thickness determination of ultrathin polymer films
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1995
Conference Paper
Title
A comparison of scanning force microscopy and ellipsometry for thickness determination of ultrathin polymer films
Author(s)
Gesang, T.
Fanter, D.
Höper, R.
Possart, W.
Hennemann, O.-D.
Mainwork
Adhesion Society. 18th Annual Meeting. Preprints
Conference
Adhesion Society (Annual Meeting) 1995
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM
