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Proximity correction for e-beam pattering on X-ray mask blanks
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1989
Conference Paper
Title
Proximity correction for e-beam pattering on X-ray mask blanks
Author(s)
Reimer, K.
Pongratz, S.
Mainwork
33rd International Symposium on Electron, Ion and Photon Beams '89. Proceedings
Conference
International Symposium on Electron, Ion and Photon Beams 1989
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT
