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Microstructure Characterization and Modifying of Materials by Focused Ion Beam Techniques
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2005
Seminar Paper
Title
Microstructure Characterization and Modifying of Materials by Focused Ion Beam Techniques
Thesis Note
Nancy, Ecole Européenne d'Ingénieur en Génie des Matériaux, Studienarbeit, 2005
Author(s)
Bernland, K.
Publishing Place
Saarbrücken
Language
English
Fraunhofer-Institut für Zerstörungsfreie Prüfverfahren IZFP
Keyword(s)
FIB
test flaw
diamond like carbon layer
subsurface defect
deposition