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Simplified resist models for efficient simulation of contact holes and line ends
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2005
Conference Paper
Title
Simplified resist models for efficient simulation of contact holes and line ends
Author(s)
Tollkühn, B.
Erdmann, A.
Semmler, A.
Nölscher, C.
Mainwork
Micro and Nano Engineering 2004. Proceedings of the 30th International Conference on Micro and Nano Engineering
Conference
International Conference on Micro and Nano Engineering (MNE) 2004
DOI
10.1016/j.mee.2004.12.065
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
