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Microstructural characterization of Al doped Zro2 MIM capacitor using atom probe tomography
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2010
Conference Paper
Title
Microstructural characterization of Al doped Zro2 MIM capacitor using atom probe tomography
Title Supplement
Abstract
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Author(s)
Shariq, A.
Fraunhofer-Center Nanoelektronische Technologien CNT
Wedderhoff, K.
Fraunhofer-Center Nanoelektronische Technologien CNT
Müller, J.
Fraunhofer-Center Nanoelektronische Technologien CNT
Teichert, S.
Mainwork
IFES 2010, 52nd International Field Emission Symposium. Program and Abstract Book
Conference
International Field Emission Symposium (IFES) 2010
Language
English
CNT
Keyword(s)
MIM capacitor
atom probe
atom probe tomography
