Waveguide integrated pin-photodiode array with high power and high linearity

We demonstrate waveguide integrated pin-photodiode arrays (WG-PDAs) by optically parallel connection of different numbers of photodiodes. A responsivity of 0.53A/W is achieved at 1550nm. At 40GHz, the WG-PDA chips with a 4-photodiode array show a RF output power of 10dBm and an OIP3 value of 26dBm. The WG-PDA chips with a 3-photodiode array generate a RF output power of 7.1dBm, 6.3dBm, 3.6dBm and 2.2dBm at 65GHz, 75GHz, 90GHz and 105GHz, respectively and an OIP3 value of 19dBm at 65GHz.