2003
Conference Paper
Title

Surface properties and electrical characteristics of rapid thermal annealed 4H-SiC

Author(s)
Bauer, A.J.
Rambach, M.
Frey, L.
Weiss, R.
Rupp, R.
Friedrichs, P.
Schörner, R.
Peters, D.
Mainwork
Conference
Language
English