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Three-dimensional compositional & structural characterization of semiconducting materials with sub-Nm resoluti
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2010
Conference Paper
Title
Three-dimensional compositional & structural characterization of semiconducting materials with sub-Nm resoluti
Title Supplement
Abstract
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Author(s)
Shariq, A.
Fraunhofer-Center Nanoelektronische Technologien CNT
Wedderhoff, K.
Fraunhofer-Center Nanoelektronische Technologien CNT
Kleint, C.
Fraunhofer-Center Nanoelektronische Technologien CNT
Teichert, S.
Mainwork
IFES 2010, 52nd International Field Emission Symposium. Program and Abstract Book
Conference
International Field Emission Symposium (IFES) 2010
Language
English
CNT
Keyword(s)
atom probe
atom probe tomography
metrology
