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Alternating ion plating - a method of high-rate ion vapor deposition
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1975
Journal Article
Title
Alternating ion plating - a method of high-rate ion vapor deposition
Author(s)
Goedicke, K.
Schiller, S.
Heisig, U.
Journal
Journal of vacuum science and technology
Language
English
Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP
