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Multiscale residual stress analysis in thin film layers
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2018
Conference Paper
Title
Multiscale residual stress analysis in thin film layers
Author(s)
Weißbach, M.
Auerswald, E.
Hildebrandt, Marcus
Rzepka, Sven
Mainwork
Smart Systems Integration 2018. International Conference and Exhibition on Integration Issues of Miniaturized Systems
Conference
International Conference and Exhibition on Integration Issues of Miniaturized Systems 2018
Smart Systems Integration Conference (SSI) 2018
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
