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  4. High-resolution confocal microscopy with low-NA objectives based on diffractive lens arrays
 
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2021
Journal Article
Title

High-resolution confocal microscopy with low-NA objectives based on diffractive lens arrays

Abstract
High resolution and large fields of view are difficult to achieve simultaneously by microscope objectives. In this work, we develop a reflection confocal microscope based on diffractive lens arrays to solve the problem. We demonstrate a prototype that generates a spot array with a numerical aperture of 0.78. Laterally, experiments show a spatial cutoff frequency of 1024 lp/mm by a 0.15 NA objective, and 912 lp/mm by a 0.07 NA objective with a 785 nm diode laser. Axially, an average height of 961 nm with a standard deviation of 49 nm is measured with a 925.5 nm calibrated step height target.
Author(s)
Li, Zheng  
Fraunhofer-Institut für Optronik, Systemtechnik und Bildauswertung IOSB  
Taphanel, Miro
Fraunhofer-Institut für Optronik, Systemtechnik und Bildauswertung IOSB  
Längle, Thomas  
Fraunhofer-Institut für Optronik, Systemtechnik und Bildauswertung IOSB  
Beyerer, Jürgen  
Fraunhofer-Institut für Optronik, Systemtechnik und Bildauswertung IOSB  
Journal
Applied optics  
DOI
10.1364/AO.423933
Language
English
Fraunhofer-Institut für Optronik, Systemtechnik und Bildauswertung IOSB  
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