Flexible Automation Concepts

The importance of using automation systems in the microelectronics industry is constantly increasing. This paper gives an overall view of the necessary steps to take when planning and installing automated transport and stocker systems in the microelectronics industry. The selection, dimensioning and flexible automation concepts during the planning phase of automation systems are all described in more detail later in this paper. The advantages of fab simulation to obtain more detailed and optimum planning results, and to have an ideal layout for automation, will be shown. Ways to integrate the material control system (MCS) which controls the automation systems, are discussed in the information technology infrastructure.