Fabrication and characterization of a form- and force-locked piezo-metal sensor module

The direct integration of piezoceramics in sheet metal is a novel approach for production of adaptronic structural metal parts. In this paper the manufacturing process and characterization results of the first piezo-metal sensor module are described. The processes include high precision generation of micro-cavities in sheet metal, microscopic piezoceramic rods, PECVD insulating layers with high dielectric strength, micro-assembly and non-positive joining by forming. For the characterization of the module measurements of surface roughness, geometric parameters, and electrical properties were performed on the rods, the micro-structured sheet, and the insulation layer. Finally, the sensor function has been proven by a mechanical excitation resulting in a proportional measured sensor signal.