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Low pressure NOCVD of tantalum oxide
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1991
Conference Paper
Title
Low pressure NOCVD of tantalum oxide
Author(s)
Rausch, N.
Burte, E.P.
Mainwork
Insulating Films on Semiconductors 91. Proceedings from the 7th Biennial European Conference
Conference
Biennial Conference of Insulating Films on Semiconductors (INFOS) 1991
Language
English
IIS-B
