2017
Presentation
Title

Atomic layer deposition of lithium titanate on planar and 3D-structured 200 mm silicon substrates

Title Supplement
Presentation held at 17th International Conference on Atomic Layer Deposition, ALD 2017, 15th - 18th July 2017, Denver, Colorado, USA
Author(s)
Bönhardt, Sascha  
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
Conference
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Language
English