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Aspects and results of long-term stable deposition of Al2O3 with high-rate pulsed reactive magnetron sputtering
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1993
Conference Paper
Title
Aspects and results of long-term stable deposition of Al2O3 with high-rate pulsed reactive magnetron sputtering
Author(s)
Frach, P.
Heisig, U.
Gottfried, C.
Walde, H.
Mainwork
Third International Conference on Plasma Surface Engineering 1992. Papers. Pt.1
Conference
International Conference on Plasma Surface Engineering 1992
DOI
10.1016/0257-8972(93)90079-4
Language
English
Fraunhofer-Institut für Elektronenstrahl- und Plasmatechnik FEP
