Optical characterization of TCO films on borate glasses for high efficiency solar cells

Two different transparent conductive oxides (TCO) were deposited by magnetron sputtering on borate glasses. The influence of sputtering conditions on optical, electrical and microstructural properties was much higher for indium tin oxide (ITO) than for aluminium-doped zinc oxide (AZO) films. Specific resistivity values obtained from simulation of the optical spectra are in good agreement with values obtained from four-point probe measurements.