2001
Conference Proceeding
Title

ASMC 2001. CD-ROM

Title Supplement
Factory Dynamics, Process Control, Advanced Process Technology, Yield Modeling and Analysis, Defect Detection and Reduction. The 12th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference, April 23-24, Munich, Germany
Person Involved
Kaufmann, T.
Corporate Author
Institute of Electrical and Electronics Engineers -IEEE-
Semiconductor Equipment and Materials International -SEMI-, San Jose/Calif.
Publisher
Publishing Place
Brüssel
Conference
Language
English
Keyword(s)