Nondestructive characterization of nanoparticles in solids by Raman spectroscopy and small angle x-ray scattering

Laser spectroscopical methods as Raman scattering (RS) and Photoluminescence as well as Small Angle Scattering of Xrays (SAXS) are presented as powerful tools for the efficient, nondestructive and contact-less characterization of nanoparticles of low concentration (< 1% in volume) in solids in dependence on the history of thermal treatment. The complementary determination of size distribution of CdSxSe1-x nanocrystallites in silicate glass filters and of arsenic precipitates in low-temperature grown GaAs layers by RS and SAXS is exemplarily presented.