Fully automated angle resolved scatterometer

The ARS-scatterometer at the IOF Jena which has been designed and built in cooperation with the Carl Zeiss JENA GmbH is capable of performing accurate measurements of the BRDF over a range of approximately eleven orders of magnitude (from 10 high5 to 10 high-6 sr high-1) in BRDF These measurements can be carried out for surfaces made of any dielectric. metallic or semiconductor material. A He-Ne-laser is used in conjunction with a mirror beam focusing optics.The eight motorized degrees of freedom of the instruments are computer controlled and interfaced to the user by a sophisticated software running under MicroSoft Windows.It is shown. that the scatterometer is sensitive to a rms-roughness better than 1 nm.