2012
Poster
Title

Evaluation of resistless Ga+ beam lithography for UV-NIL stamp fabrication

Title Supplement
Poster at 11th International Conference on Nanoimprint & Nanoprint Technology, October 24-26, 2012, Silverado Resort, Napa, California
Author(s)
Rumler, Maximilian
Fader, Robert
Haas, Anke  
Rommel, Mathias  orcid-logo
Bauer, A.J.
Frey, Lothar
Conference
File(s)
Rights
Use according to copyright law
DOI
Language
English
Keyword(s)