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  4. Measurement of surface topographies in the nm-range for power chip technologies by a modified low-coherence interferometer
 
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2016
Conference Paper
Titel

Measurement of surface topographies in the nm-range for power chip technologies by a modified low-coherence interferometer

Abstract
This work introduces a modified low-coherence interferometry approach for nanometer surface-prolometry. The key component of the interferometer is an element with known dispersion which defines the measurement range as well as the resolution. This dispersive element delivers a controlled phase variation which can be detected in the spectral domain and used to reconstruct height differences on a sample. In the chosen setup, both axial resolution and measurement range are tunable by the choice of the dispersive element. The basic working principle was demonstrated by a laboratory setup equipped with a supercontinuum light source (Dl= 400-1700 nm). Initial experiments were carried out to characterize steps of 101 nm on a silicon height standard. The results showed that the system delivers an accuracy of about 11.8 nm. These measurements also served as a calibration for the second set of measurements. The second experiment consisted of the measurement of the bevel of a silicon wafer. The modified low-coherence interferometer could be utilized to reproduce the slope on the edge within the previously estimated accuracy. The main advantage of the proposed measurement approach is the possibility to collect data without the need for mechanically moving parts.
Author(s)
Taudt, Christopher
Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS
Baselt, Tobias
Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS
Nelsen, Bryan L.
Westsächsische Hochschule Zwickau
Aßmann, Heiko
Inneon Technologies Dresden GmbH
Greiner, Andreas
Inneon Technologies Dresden GmbH
Koch, Edmund
TU Dresden, Medizinische Fakultät
Hartmann, Paul
Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS
Hauptwerk
Photonic Instrumentation Engineering III
Project(s)
Dispersionsmessplatz
Funder
Bundesministerium für Bildung und Forschung BMBF (Deutschland)
Konferenz
Conference "Photonic Instrumentation Engineering" 2016
DOI
10.1117/12.2212913
File(s)
N-415135.pdf (494.6 KB)
Language
English
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Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS
Tags
  • dispersion based measurements

  • in-line characterization

  • interferometric measurement

  • low-coherence interferometry

  • optical metrology

  • surface profilometry

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