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Residual stress states in sputtered Ti1-xSixNy films
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2002
Zeitschriftenaufsatz
Titel
Residual stress states in sputtered Ti1-xSixNy films
Author(s)
Vaz, F.
Rebouta, L.
Goudeau, P.
Riviere, J.P.
Schäffer, E.
Kleer, G.
Bodmann, M.
Zeitschrift
Thin solid films
DOI
10.1016/S0040-6090(01)01672-8
Language
Englisch
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