Dependence of the surface morphology and scattering of optical coatings on film material, substrate roughness, and deposition process

Substrate properties, coating design, and deposition process determine the surface morphology of optical coatings. The contribution of each factor can be estimated by measuring the surface topography with a Scanning Force Microscope (SFM) and calculating the Power Spectral Density functions (PSD). We present results for oxide and fluoride coatings on well polished glass and silicon substrates. The scattering of the coatings is predicted by calculations based on SFM data and compared with results from angle resolved scattering measurements.