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  4. High-speed deformation measurement using spatially phase-shifted speckle interferometry
 
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2014
Conference Paper
Title

High-speed deformation measurement using spatially phase-shifted speckle interferometry

Abstract
Electronic speckle pattern interferometry (ESPI)is a powerful technique for differential shape measurement with submicron resolution. Using spatial phase-shifting (SPS), no moving parts are required, allowing frame acquisition rates limited by camera hardware. We present ESPI images of 1 megapixel resolution at 500 fps. Analysis of SPS data involves complex, time-consuming calculations. The graphics processing units found in state-of-the-art personal computers have exceptional parallel processing capabilities, allowing real-time SPS measurements at video frame rates. Deformation analysis at this frame rate can be used to analyze transient phenomena such as transient temperature effects in integrated circuit chips or during material processing.
Author(s)
Beckmann, Tobias
Fraunhofer-Institut für Physikalische Messtechnik IPM  
Fratz, Markus  
Fraunhofer-Institut für Physikalische Messtechnik IPM  
Bertz, Alexander  
Fraunhofer-Institut für Physikalische Messtechnik IPM  
Carl, Daniel  
Fraunhofer-Institut für Physikalische Messtechnik IPM  
Mainwork
Practical Holography XXVIII. Materials and Applications  
Conference
Conference "Practical Holography - Materials and Applications" 2014  
Open Access
DOI
10.24406/publica-r-384055
10.1117/12.2037718
File(s)
N-283214.pdf (2.88 MB)
Rights
Under Copyright
Language
English
Fraunhofer-Institut für Physikalische Messtechnik IPM  
Keyword(s)
  • speckle interferometry

  • deformation

  • real-time

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