2006
Conference Paper
Title

Large scale, drift free monocrystalline silicon micromirror arrays made by wafer bonding

Author(s)
Bakke, T.
Völker, B.
Friedrichs, M.
Rudloff, D.
Schenk, H.
Lakner, H.
Mainwork
Conference
DOI
Language
English
Keyword(s)