Deterministic polishing of smooth and structured molds

The replication of ultra precise optical components requires molds with an extremely low surface roughness, a minimum of defectivity and high shape accuracy. To meet these demands polishing is essential. In comparison to other fields of application, polishing molds combines high demands and new geometries, e.g. aspherical cavities or structured surfaces for cylindrical lens arrays. Due to a lack of suitable polishing strategies, tools and innovative tool machines, the molds often have to be polished manually. In this chapter the authors discuss the major aspects for deterministic polishing starting from basic investigations on the material removal mechanisms to process strategies, tool development and design of innovative polishing tool machines. The materials dealt with reach from steel to advanced ceramics and tungsten carbide. The addressed geometries are smooth molds with a continuous surface as well as structured surfaces. The discussed issues look at the needs in replication of both plastic and glass optics.