1998
Conference Paper
Title

Optical, structural and mechanical properties of lanthanide trifluoride thin film materials for use in the DUV-spectral region

Abstract
Optical, structural and mechanical properties of evapored films of NdF3, LaF3, GdF3 and of different dielectric multilayer coatings for DUV-eximer laser applications have been studied.
Author(s)
Thielsch, R.
Heber, J.
Jakobs, S.
Kaiser, N.
Duparre, A.
Ullmann, J.
Mainwork
Conference
Language
English
Keyword(s)