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Reliable matching of 300 mm defect inspection tools @ sub 60 nm defect size
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2005
Conference Paper
Title
Reliable matching of 300 mm defect inspection tools @ sub 60 nm defect size
Author(s)
Nutsch, A.
Supplieth, F.
Pfitzner, L.
Ryssel, H.
Mainwork
ISSM 2005, IEEE International Symposium on Semiconductor Manufacturing. Conference proceedings
Conference
International Symposium on Semiconductor Manufacturing (ISSM) 2005
DOI
10.1109/ISSM.2005.1513347
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
