Numerical prototyping and defect evaluation of scanning acoustic microscopy for advanced failure diagnostics

The excitation and propagation of acoustic waves as employed in scanning acoustic microscopy follows highly complex phenomena which commonly cannot be visualized experimentally. The current paper describes the application of modelling and numerical simulation of these phenomena in structures like complex microelectronic samples or acoustic lenses. The design of acoustic lenses and their active elements have been optimized based on the numerical studies performed here. Simulation based visualization of the wave propagation and energy conversion in a Through Silicon Via with different defects at 1 GHz acoustic frequency supported the understanding and interpretation of the received acoustic signals.