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  4. Applying a physics-based via model for the simulation of Through Silicon Vias
 
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2013
Conference Paper
Title

Applying a physics-based via model for the simulation of Through Silicon Vias

Abstract
This paper presents a first approach for the efficient modeling of Through Silicon Vias based on a Physics-Based Via model for application in silicon interposers with metallic boundaries.
Author(s)
Dahl, D.
Duan, X.
Beyreuther, A.
Ndip, I.
Lang, K.-D.
Schuster, C.
Mainwork
22nd Conference on Electrical Performance of Electronic Packaging and Systems, EPEPS 2013  
Conference
Conference on Electrical Performance of Electronic Packaging and Systems (EPEPS) 2013  
DOI
10.1109/EPEPS.2013.6703468
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM  
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