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  4. Combination of ceramic laser micromachining and printed technology as a way for rapid prototyping semiconductor gas sensors
 
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2021
Journal Article
Title

Combination of ceramic laser micromachining and printed technology as a way for rapid prototyping semiconductor gas sensors

Abstract
The work describes a fast and flexible micro/nano fabrication and manufacturing method for ceramic Micro-electromechanical systems (MEMS)sensors. Rapid prototyping techniques are demonstrated for metal oxide sensor fabrication in the form of a complete MEMS device, which could be used as a compact miniaturized surface mount devices package. Ceramic MEMS were fabricated by the laser micromilling of already pre-sintered monolithic materials. It has been demonstrated that it is possible to deposit metallization and sensor films by thick-film and thin-film methods on the manufactured ceramic product. The results of functional tests of such manufactured sensors are presented, demonstrating their full suitability for gas sensing application and indicating that the obtained parameters are at a level comparable to those of industrial produced sensors. Results of design and optimization principles of applied methods for micro- and nanosystems are discussed with regard to future, wider application in semiconductor gas sensors prototyping.
Author(s)
Samotaev, Nikolay
National Research Nuclear University Moscow
Oblov, Konstantin
National Research Nuclear University Moscow
Dzhumaev, Pavel
National Research Nuclear University Moscow
Fritsch, Marco  
Fraunhofer-Institut für Keramische Technologien und Systeme IKTS  
Mosch, Sindy  
Fraunhofer-Institut für Keramische Technologien und Systeme IKTS  
Vinnichenko, Mykola  
Fraunhofer-Institut für Keramische Technologien und Systeme IKTS  
Trofimenko, Nikolai  
Fraunhofer-Institut für Keramische Technologien und Systeme IKTS  
Baumgärtner, Christoph  orcid-logo
Fraunhofer-Institut für Keramische Technologien und Systeme IKTS  
Fuchs, Franz-Martin
KERAFOL Keramische Folien
Wissmeier, Lena
KERAFOL Keramische Folien
Journal
Micromachines  
Project(s)
MANUNET
Funder
European Commission EC  
Bundesministerium für Bildung und Forschung BMBF (Deutschland)  
Bundesministerium für Bildung und Forschung BMBF (Deutschland)  
Open Access
DOI
10.3390/mi12121440
Additional full text version
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Language
English
Fraunhofer-Institut für Keramische Technologien und Systeme IKTS  
Keyword(s)
  • laser micromachining

  • thin ceramic membrane

  • Platinum ink

  • printing technology

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