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  4. Deflectometry setup for machine integrated measurement of specular surfaces miniaturized phase measuring
 
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2011
Conference Paper
Titel

Deflectometry setup for machine integrated measurement of specular surfaces miniaturized phase measuring

Author(s)
Häusler, G.
Uhlmann, E.
Faber, C.
Olesch, E.
Röttinger, C.
Kurz, M.
Hauptwerk
11th International Conference of the European Society for Precision Engineering and Nanotechnology 2011. Proceedings. Vol.1
Konferenz
European Society for Precision Engineering and Nanotechnology (EUSPEN International Conference) 2011
European Society for Precision Engineering and Nanotechnology (EUSPEN Annual Genereal Meeting) 2011
European Society for Precision Engineering and Nanotechnology (EUSPEN International Meeting) 2011
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