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  4. Surface acoustic wave spectroscopy for non‐destructive coating and bulk characterization at temperatures up to 600°C enabled by piezoelectric aluminum nitride coated sensor
 
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2024
Journal Article
Title

Surface acoustic wave spectroscopy for non‐destructive coating and bulk characterization at temperatures up to 600°C enabled by piezoelectric aluminum nitride coated sensor

Abstract
Surface acoustic wave spectroscopy has been established as non-destructive and fast method for characterization of mechanical properties of surfaces and bulk materials in both research and industry. The present work shows that by application of a novel and robust aluminum nitride (AlN) coated piezoelectric contact sensor the advantages of the method can be extended from room temperature to at least 600°C. An overview of sensor concepts and applications of the method is discussed first, followed by theoretical and practical considerations for design and coating of a novel temperature stable contact sensor. After fabrication of such a sensor using magnetron sputtering, it was tested in a modified surface acoustic wave spectroscopy setup with an incorporated heating table concerning signal amplitude and frequency range. The AlN coated sensor was found to perform well up to 600°C, with temperature limited by the specification of the heating table. At room temperature, performance was acceptable when compared with a conventional contact sensor using a PVDF piezoelectric foil. Application of the high temperature capabilities of the setup was demonstrated by measuring temperature stability of hydrogen-free amorphous carbon coatings (a-C and ta-C) depending on their sp3 carbon ratio. In another example, high precision temperature dependent measurement of Young's modulus for ultrasonic fatigue test specimen was taken, achieving an accuracy better than 1%. Use of the developed sensor opens up new possibilities in material science for in situ study of temperature depending mechanical properties for coatings and surfaces.
Author(s)
Makowski, Stefan  
Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS  
Zawischa, Martin  orcid-logo
Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS  
Schneider, Dieter
Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS  
Barth, Stephan  
Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP  
Schettler, Sebastian  
Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS  
Hoang, Thanh-Tung
Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS  
Bartzsch, Hagen  orcid-logo
Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP  
Zimmermann, Martina  
Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS  
Journal
Surface and Interface Analysis  
Open Access
DOI
10.1002/sia.7291
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Language
English
Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS  
Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP  
Keyword(s)
  • AlN

  • coating characterization

  • high temperature

  • surface acoustic wave spectroscopy

  • ta-C

  • ultrasonic fatique

  • LAwave

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