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  4. Novel etching process based on molten salts for optical fiber components
 
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2022
Conference Paper
Title

Novel etching process based on molten salts for optical fiber components

Abstract
Optical fiber components have the potential of enabling interconnections in compact systems because they provide reliable and efficient manipulation of light in application fields such as telecommunication, sensing and high power. A variety of glasses and fiber components including tapers, tips, bundles and couplers are typically fabricated using hydrofluoric acidbased etching processes. However, such a standard approach has some limitations related to the generation of surface defects (e.g., roughness and microcracks), poor process control and high chemical disposal costs. We propose an innovative glass etching process based on molten salts that will overcome these limitations. Molten salts can be thermally activated to etch glass materials with high precision. Initial plant development and industrial manufacturing capabilities are demonstrated on a modular etching system through a research collaboration. This system also has the advantage of managing a set of fibers simultaneously with an automatic process control. First results of etched glasses and especially, biconical fiber tapers show extremely smooth surfaces, good homogeneity, high reproducibility and potential scalability for further processing of fiber couplers. With respect to the fabrication tolerances, a value of ± 1 μm over a length of 10 mm has been found for the case of etched multimode tapers. The use of molten salts as an etching tool can be extended to economically create microstructures in glass panels for optical or fluidic purposes.
Author(s)
Arndt-Staufenbiel, Norbert  
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM  
Emde, Stefan
Amstog GmbH
Zamora, Vanessa
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM  
Nguyen, Tiet Duyet
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM  
Janeczka, Christian
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM  
Stühff, Holger
Amstog GmbH
Schröder, Henning  
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM  
Schneider-Ramelow, Martin  
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM  
Mainwork
Optical Interconnects XXII  
Project(s)
Entwicklung einer modular strukturierten Anlagentechnik für das Glasätzen auf der Basis reduzierender Salzschmelzen  
Funding(s)
KMU-innovativ  
Funder
Bundesministerium für Bildung und Forschung -BMBF-  
Conference
Conference "Optical Interconnects" 2022  
DOI
10.1117/12.2610746
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM  
Keyword(s)
  • Biconical taper

  • Fiber components

  • Glass etching

  • Glass ion-exchange

  • Modular demonstration plant

  • Molten salts

  • Optical fibers

  • Subtractive process

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