2009
Journal Article
Title

Influence of the amorphous/crystalline phase of Zr1-xAlxO2 high-k layers on the capacitance performance of metal insulator metal stacks

Author(s)
Pakaleva, A.
Lemberger, M.
Bauer, A.J.
Weinreich, W.
Heitmann, J.
Erben, E.
Schröder, U.
Oberbeck, L.
Journal
DOI
Language
English