English
Deutsch
Log In
Log in with Fraunhofer Smartcard
Password Login
Research Outputs
Fundings & Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Artikel
Mu-m-resolved high resolution x-ray diffraction imaging for semiconductor quality control
Details
Full
Export
Statistics
Options
Show all metadata (technical view)
2000
Journal Article
Title
Mu-m-resolved high resolution x-ray diffraction imaging for semiconductor quality control
Author(s)
Lübbert, D.
Baumbach, T.
Härtwig, J.
Boller, E.
Pernot, E.
Journal
Nuclear instruments and methods in physics research, Section B. Beam interactions with materials and atoms
DOI
10.1016/S0168-583X(99)00619-9
Language
English
IZFP-D
