Functional coatings deposition in microfluidic systems by dbd-based PA-CVD

Using atmospheric-pressure dielectric barrier discharges (DBD), microfluidic systems have been modified by deposition of Si-based coatings in order to obtain, e.g., hydrophilicity of internal walls. The coatings were characterized by microscopic FTIR-spectroscopy and wetting experiments. In order to control the spatial coating thickness distribution, the influence of the electric field magnitude and orientation was considered. The deposition rate was investigated as a function of gas flow velocity, plasma-pulsing and cavity geometry.