2001
Conference Paper
Title

Bulk micromachined and wafer bonded resonators for vacuum pressure measurement

Author(s)
Hiller, K.
Kurth, S.
Zichner, N.
Gessner, T.
Dötzel, W.
Iwert, T.
Fritsch, H.
Biehl, S.
Mainwork
Conference
Language
English