Micro-structured electrode arrays: A source of high-pressure non-thermal plasma

High-pressure discharges are generated using Micro-Structured Electrode (MSE) arrays with electrode distances between 50 and 250 µm. These arrays consist either of a planar electrode system bonded to a dielectric substrate or of a matrix of holes perforated in a composite sheet made out of two metallic foils separated by an insulator. Stable discharges were produced for pressures ranging from 10 to 1000 mbar using DC and radio frequency excitation. The optical appearance is that of a homogeneous glow discharge. Spectral investigations have revealed the presence of a large number density of metastable atoms and highly energetic electrons, while the discharge has a non-thermal character. The non-equilibrium high -pressure plasma provided by the MSE arrays is suitable for surface activation, thin film deposition and reduction of pollutants.