2000
Journal Article
Title

Reducing airborne molecular contamination by efficient purging of FOUPs for 300-mm wafers. The influence of material properties

Author(s)
Frickinger, J.
Bügler, J.
Zielonka, G.
Pfitzner, L.
Ryssel, H.
Hollemann, S.
Schneider, H.
Journal
DOI
Language
English