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  4. Fiber-optic interferometer for absolute distance measurements with high measuring frequency
 
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2002
Conference Paper
Title

Fiber-optic interferometer for absolute distance measurements with high measuring frequency

Abstract
White light interferometry or coherence radar is a well known and established measurement technique for years. But especially the field of production technology and medical technology need measurement systems with continuously increasing performance. This paper demonstrates, how the use of special optical components for higher measurement frequencies and the miniaturizing of the sensor tip can enlarge the application fields for this system. First, the fundamental aspects of white light interferometry are presented and lead to the new concept of a distance measurement system. It is shown how the inset of a special stepped mirror in the detection interferometer increases the measurement frequency and how the sensor is miniaturized using a Fabry-Perot interferometer.
Author(s)
Depiereux, Frank
Bosbach, Christof
Pfeifer, Tilo
Mainwork
Seventh International Symposium on Laser Metrology, Applied to Science, Industry, and Everyday Life 2002. Vol.1  
Conference
International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life 2002  
DOI
10.1117/12.484589
Language
English
Fraunhofer-Institut für Produktionstechnologie IPT  
Keyword(s)
  • white light interferometry

  • fiber optic

  • distance measurement

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