2006
Conference Paper
Title

Flying wafer - A standardised methodology for multi-site processing Of 300 Mm wafers at research and development-sites

Author(s)
Frickinger, J.
Öchsner, R.  
Schellenberger, M.  
Pfeffer, M.  
Pfitzner, L.
Ryssel, H.
Claes, M.
Bearda, T.
Renaud, D.
Danel, A.
Lering, M.
Graef, M.
Kaushik, V.
Murphy, B.
Fritzsche, M.
Walther, H.
Hury, S.
Mainwork
Conference
Language
English