A VMEbus based laser beam test system for IC failure analysis

As an approach towards automated contactless IC probing we describe a laser beam test system for failure analysis in digital CMOS circuits coupled to the CAD data base. The CAD coupling was realized between a VME host and a VAX computer. Task control and image processing is done by a VME control process. After introducing the hard- and software of the realized configuration a typical application example explains the system performance.