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  4. A fully CMOS compatible infrared sensor fabricated on SIMOX-substrates
 
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1993
Conference Paper
Title

A fully CMOS compatible infrared sensor fabricated on SIMOX-substrates

Abstract
We report on the use of SIMOX substrates for fabrication or IR radiation thermopiles by CMOS technology. SIMOX technology enables the fabrication of single-crystal leads on thin silicon or silicon oxide membranes. Two p-type silicon/aluminium thermopiles on different membranes are presented. A thermopile with a 4 fm thick, epitaxially grown silicon membrane has a responsivity of 18 V/W and a time constant of 3 ms. Using a 2.5 fm thick silicon oxide membrane, a responsivity of 150 V/W and a time constant of 25 ms are achieved. In addition, the fabrication and properties of an IR absorber made in CMOS technology are presented.
Author(s)
Müller, M.
Gottfried-Gottfried, R.
Kück, H.
Mokwa, W.
Mainwork
Eurosensors VII. Book of Abstracts  
Conference
Eurosensors 1993  
Language
English
IMS2  
Keyword(s)
  • Infrarotdetektor

  • Meßaufnehmer

  • Mikrosystemtechnik

  • SIMOX

  • Thermosäule

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