Innovative fast tool servo system using mass compensation and damping system

New applications in illumination optics using LEDs require a lens or a mould design that combines free-form geometries with microstructures [1]. An efficient way of producing these so called hybrid optics is the machining by the use of a hybrid Fast Tool Servo system (FTS). Such hybrid FTS is the combination of a highly dynamic, piezo driven FTS with a dynamic axis or Slow Tool. Due to this arrangement it is necessary that any disturbances on the underlying axis caused by inertia forces of the highly dynamic tool movement have to be avoided. Further a high bandwidth of the FTS is needed for efficient microstructuring processes. Therefore this paper describes an innovative, piezo driven FTS with mass compensation and damping to improve the dynamic behavior.