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Low temperature wafer bonding for microsystems using dielectric barrier discharge
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2010
Journal Article
Title
Low temperature wafer bonding for microsystems using dielectric barrier discharge
Author(s)
Wünsch, Dirk
Wiemer, Maik
Gabriel, M.
Geßner, Thomas
Journal
MST News
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
