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1992
Journal Article
Title
MOVPE growth and characterization of InGaAs/In(GaAs)P and InGaAsP/InP/InAlAs multi-quantum-well structures for electro-optic switching devices
Abstract
The authors report on MOVPE growth and characterization of InGaAs/In(GaAs)P and InGaAsP/InP/InAlAs multi-quantum-well structures for electro-optic switching devices, which require abrupt compositional and doping interfaces. Strongly coupled InGaAs/InP Wannier superlattices with a large number of periods show excellent photoluminescence quality and surface morphology. In addition, band-filling effects with very low leakage current density are demonstrated by incorporating InAlAs barrier layers into InGaAsP/InP modulation doped electron transfer structures.
Keyword(s)
aluminium compounds
electro-optical devices
gallium arsenide
gallium compounds
iii-v semiconductors
indium compounds
luminescence of inorganic solids
photoluminescence
semiconductor growth
semiconductor quantum wells
surface structure
vapour phase epitaxial growth
metalorganic vapour phase epitaxial growth
compositional interfaces
characterization
electro-optic switching devices
doping interfaces
inGaAs/InP wannier superlattices
photoluminescence quality
surface morphology
band-filling effects
leakage current density
inalas barrier layers
inGaAsp/InP modulation doped electron transfer structures
inGaAsp-InP-inalas multiquantum well structures
inGaAs-in(GaAs)p multiquantum well structures
inGaAsp-in(GaAs)p
inGaAsp-InP-inalas