2015
Master Thesis
Title

Development and characterization of a novel CoXN barrier film for future semiconductor technology nodes

Thesis Note
Dresden, TU, Master Thesis, 2015
Author(s)
Dhavamani, Abitha
Advisor(s)
Bartha, Johann Wolfgang
Technische Universität <Dresden, Germany>
Person Involved
Uhlig, Benjamin
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
Publishing Place
Dresden
Language
English