Piezoresistive low-pressure sensor with high sensitivity and accuracy

A piezoresistive low-pressure sensor featuring a variety of advantages because of its novel design is introduced. The main objective of this development was to realize a sensor with high sensitivity, high overload capacity, and low linearity error. This publication describes the theory for the design of the piezoresisitve low-pressure sensor. In comparison to familiar sensor concepts, the sensor developed for the pressure range of plus minus 10 kPa exhibits excellent properties (sensitivity is equal to 35 mV/V full-scale output and linearity error is equal to 0.05%). The sensor characteristics determined theoretically were by measurements on realized pressure sensors.