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  4. Piezoresistive low-pressure sensor with high sensitivity and accuracy
 
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1990
Journal Article
Title

Piezoresistive low-pressure sensor with high sensitivity and accuracy

Other Title
Piezoresistiver Niederdrucksensor mit hoher Empfindlichkeit und Genauigkeit
Abstract
A piezoresistive low-pressure sensor featuring a variety of advantages because of its novel design is introduced. The main objective of this development was to realize a sensor with high sensitivity, high overload capacity, and low linearity error. This publication describes the theory for the design of the piezoresisitve low-pressure sensor. In comparison to familiar sensor concepts, the sensor developed for the pressure range of plus minus 10 kPa exhibits excellent properties (sensitivity is equal to 35 mV/V full-scale output and linearity error is equal to 0.05%). The sensor characteristics determined theoretically were by measurements on realized pressure sensors.
Author(s)
Kühl, K.
Sandmaier, H.
Journal
Sensors and Actuators. A  
Conference
International Conference on Solid-State Sensors and Actuators 1989  
Language
English
IFT  
Keyword(s)
  • bossed plate

  • Kompensation

  • low pressure sensor

  • Nichtlinearität

  • Niederdrucksensor

  • non-linearity compensation

  • piezoresistive effect

  • piezoresistiver Effekt

  • versteifte Platte

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